Journal of Artificial Intelligence and Robotics

ABSTRACT

In order to solve the nationalization of Chinese semiconductor robot controllers, this paper studies the critical technology of semiconductor robot controllers. Firstly, the article describes the industry background and primary application of semiconductor robots and analyzes the core components' main problems. Secondly, the paper introduces the semiconductor robot's software architecture and technical index and designs a real-time controller function software based on x86 architecture. Third, the article studies the key software technologies of semiconductor robot controllers, and critical technologies such as high-precision trajectory planning, active wafer center, safety protection, and fast teaching are introduced. Finally, the robot controller software designed in this paper adopts layered architecture to ensure system reliability and meet the needs of the semiconductor manufacturing industry. The robot controller software supports non-standard requirements flexibly through modular design in the advanced technology and platform reliability to reach the domestic leading level.

Article History

KEYWORDS

1. Robot controller
2. Software architecture
3. Wafer alignment technology
4. High precision trajectory planning
5. Security protection